Film growth by polyatomic C2H5+ bombarding a diamond (100) surfaces: Molecular dynamics study

被引：3

作者：

Lu, X. D. ^{[1
]}

Qin, Y. ^{[1
]}

Ning, J. ^{[1
]}

Zhou, T. ^{[1
]}

Deng, C. Y. ^{[1
]}

Meng, Ch. ^{[1
]}

Qiu, Q. ^{[2
]}

Gou, F. ^{[1
,3
]}

Chuanwu, Zhang

Ying, Yan

Ming, Jiang

机构：

[1] Guizhou Univ, Inst Plasma Surface Interact, Guiyang 550025, Guizhou Prov, Peoples R China

[2] Guiyang Med Coll, Guiyang 550025, Guizhou Prov, Peoples R China

[3] FOM Inst Plasma Phys, NL-3430 BE Nieuwegein, Netherlands

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2009年 / 267卷 / 18期

关键词：

Molecular dynamics methods; Surface etching; Plasma-based ion implantation and deposition; CARBON; DEPOSITION; SIMULATION; EROSION; IMPACT;

D O I：

10.1016/j.nimb.2009.06.059

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The deposition of polyatomic C2H5+ ions is studied using classical molecular dynamics simulations with a new improved Brenner potentials developed by Brenner. The simulation results show that when the incident energy is less than 65 eV, the deposition coefficient of H is larger than that of C atoms. When the incident energy is larger than 65 eV, the deposition of H is less than that of C atoms. With increasing incident energy, a transition from Csp3-rich to Csp2-rich in the grown films is found. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：3238 / 3241

页数：4

共 20 条

[11] Redeposition of hydrocarbon layers in fusion devices [J].

Jacob, W .

JOURNAL OF NUCLEAR MATERIALS, 2005, 337 (1-3) :839-846

[12] Molecular dynamics simulation of the impact behaviour of various hydrocarbon species on DLC [J].

Neyts, E ;

Bogaerts, A ;

Gijbels, R ;

Benedikta, J ;

van de Sanden, MCM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 228 :315-318

[13] Diamond-like amorphous carbon [J].

Robertson, J .

MATERIALS SCIENCE & ENGINEERING R-REPORTS, 2002, 37 (4-6) :129-281

[14] Status of knowledge of chemical erosion of carbon and critical issues for extrapolation to ITER [J].

Roth, J .

PHYSICA SCRIPTA, 2006, T124 :37-43

[15] Synopsis of erosion and redeposition [J].

Roth, J .

PHYSICA SCRIPTA, 2001, T91 :65-69

[16] EMPIRICAL INTERATOMIC POTENTIAL FOR CARBON, WITH APPLICATIONS TO AMORPHOUS-CARBON [J].

TERSOFF, J .

PHYSICAL REVIEW LETTERS, 1988, 61 (25) :2879-2882

[17] Molecular dynamics simulations of CH3 sticking on carbon first wall structures [J].

Träskelin, P ;

Salonen, E ;

Nordlund, K ;

Krasheninnikov, AV ;

Keinonen, J ;

Wu, CH .

JOURNAL OF NUCLEAR MATERIALS, 2003, 313 :52-55

[18] DEPOSITION OF HYDROGENATED CARBON LAYERS FROM CH3+ ION-BEAMS [J].

WANG, WM ;

ECKSTEIN, W ;

SCHWORER, R ;

PLANK, H ;

ROTH, J .

JOURNAL OF NUCLEAR MATERIALS, 1995, 220 :1033-1037

[19] Effect of polyatomic ion structure on thin-film growth: Experiments and molecular dynamics simulations [J].

Wijesundara, MBJ ;

Ji, Y ;

Ni, B ;

Sinnott, SB ;

Hanley, L .

JOURNAL OF APPLIED PHYSICS, 2000, 88 (09) :5004-5016

[20] Molecular dynamics simulation of the deposition process of hydrogenated diamond-like carbon (DLC) films [J].

Zhang YuJun ;

Dong GuangNeng ;

Mao JunHong ;

Xie YouBai .

CHINESE SCIENCE BULLETIN, 2008, 53 (07) :1094-1099

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