Film growth by polyatomic C2H5+ bombarding a diamond (100) surfaces: Molecular dynamics study

被引：3

作者：

Lu, X. D. ^{[1
]}

Qin, Y. ^{[1
]}

Ning, J. ^{[1
]}

Zhou, T. ^{[1
]}

Deng, C. Y. ^{[1
]}

Meng, Ch. ^{[1
]}

Qiu, Q. ^{[2
]}

Gou, F. ^{[1
,3
]}

Chuanwu, Zhang

Ying, Yan

Ming, Jiang

机构：

[1] Guizhou Univ, Inst Plasma Surface Interact, Guiyang 550025, Guizhou Prov, Peoples R China

[2] Guiyang Med Coll, Guiyang 550025, Guizhou Prov, Peoples R China

[3] FOM Inst Plasma Phys, NL-3430 BE Nieuwegein, Netherlands

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2009年 / 267卷 / 18期

关键词：

Molecular dynamics methods; Surface etching; Plasma-based ion implantation and deposition; CARBON; DEPOSITION; SIMULATION; EROSION; IMPACT;

D O I：

10.1016/j.nimb.2009.06.059

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The deposition of polyatomic C2H5+ ions is studied using classical molecular dynamics simulations with a new improved Brenner potentials developed by Brenner. The simulation results show that when the incident energy is less than 65 eV, the deposition coefficient of H is larger than that of C atoms. When the incident energy is larger than 65 eV, the deposition of H is less than that of C atoms. With increasing incident energy, a transition from Csp3-rich to Csp2-rich in the grown films is found. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：3238 / 3241

页数：4

共 20 条

[1] MOLECULAR-DYNAMICS WITH COUPLING TO AN EXTERNAL BATH [J].

BERENDSEN, HJC ;

POSTMA, JPM ;

VANGUNSTEREN, WF ;

DINOLA, A ;

HAAK, JR .

JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (08) :3684-3690

[2] EMPIRICAL POTENTIAL FOR HYDROCARBONS FOR USE IN SIMULATING THE CHEMICAL VAPOR-DEPOSITION OF DIAMOND FILMS [J].

BRENNER, DW .

PHYSICAL REVIEW B, 1990, 42 (15) :9458-9471

[3] A second-generation reactive empirical bond order (REBO) potential energy expression for hydrocarbons [J].

Brenner, DW ;

Shenderova, OA ;

Harrison, JA ;

Stuart, SJ ;

Ni, B ;

Sinnott, SB .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2002, 14 (04) :783-802

[4] Deposition of diamondlike carbon films by plasma enhanced chemical vapour deposition [J].

Choi, SS ;

Kim, DW ;

Joe, JW ;

Moon, JH ;

Park, KC ;

Jang, J .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 46 (1-3) :133-136

[5]

Collins JL, 1998, IND DIAMOND REV, V58, P90

[6] The application of molecular dynamics to the study of plasma-surface interactions: CFx with silicon [J].

Gou, F. ;

Kleyn, A. W. ;

Gleeson, M. A. .

INTERNATIONAL REVIEWS IN PHYSICAL CHEMISTRY, 2008, 27 (02) :229-271

[7] Molecular dynamics simulation of CH3 interaction with Si(100) surface [J].

Gou, F. ;

Gleeson, M. A. ;

Kleyn, A. W. .

SURFACE SCIENCE, 2007, 601 (18) :3965-3969

[8] Hydrocarbon film growth by energetic CH3 molecule impact on SiC (001) surface [J].

Gou, F. ;

Meng, Chuanliang ;

Zhouling, Z. T. ;

Qian, Qiu .

APPLIED SURFACE SCIENCE, 2007, 253 (20) :8517-8523

[9]

HAGSTRUM HD, 1988, ELECT ION SPECTROSCO

[10] Molecular dynamics simulations of polyatomic-ion beam deposition-induced chemical modification of carbon nanotube/polymer composites [J].

Hu, YH ;

Sinnott, SB .

JOURNAL OF MATERIALS CHEMISTRY, 2004, 14 (04) :719-729

← 1 2 →