Simultaneous plasmachemical reduction of mixed tungsten and titanium precursors

To get tungsten powder doped with titanium we reduced the ammonium paratungstate (APT) in a hydrogen discharge adding titanium tetrachloride (TiCl4) to the gas feed. For this purpose we used a low pressure inductively coupled plasma (ICP). All the discharge conditions were kept constant except the flow rate of TiCl4. Produced powders were analysed by a X-ray diffraction (XRD), a scanning electron microscopy (SEM) and an atomic absorption spectroscopy (AAS). We observed that the powder consisted from two separated phase, tungsten and titanium. The maximum titanium content was 2%.