Highly conductive and transparent gallium doped zinc oxide thin films via chemical vapor deposition

被引：119
|
作者：
Ponja, Sapna D. [1 ]
Sathasivam, Sanjayan [1 ]
Parkin, Ivan P. [1 ]
Carmalt, Claire J. [1 ]
机构：
[1] UCL, Dept Chem, Mat Chem Ctr, 20 Gordon St, London WC1H 0AJ, England
来源：
SCIENTIFIC REPORTS | 2020年 / 10卷 / 01期
基金：
英国工程与自然科学研究理事会;
关键词：
OPTOELECTRONIC PROPERTIES; GROWTH-BEHAVIOR; ZNO FILMS; TEMPERATURE;
D O I：
10.1038/s41598-020-57532-7
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
Degenerately doped ZnO is seen as a potential substitute to the ubiquitous and expensive Sn doped In2O3 as a transparent electrode in optoelectronic devices. Here, highly conductive and transparent Ga doped ZnO thin films were grown via aerosol assisted chemical vapor deposition. The lowest resistivity (7.8x10(-4) ohm .cm) and highest carrier concentration (4.23x10(20)cm(-3)) ever reported for AACVD grown ZnO: Ga was achieved due to using oxygen poor growth conditions enabled by diethylzinc and triethylgallium precursors.
引用
收藏
页数：7
相关论文
共 50 条
  • [1] Highly conductive and transparent gallium doped zinc oxide thin films via chemical vapor deposition
    Sapna D. Ponja
    Sanjayan Sathasivam
    Ivan P. Parkin
    Claire J. Carmalt
    Scientific Reports, 10
  • [2] Transparent and Conductive Molybdenum-Doped ZnO Thin Films via Chemical Vapor Deposition
    Zhao, Donglei
    Sathasivam, Sanjayan
    Li, Jianwei
    Carmalt, Claire J.
    ACS APPLIED ELECTRONIC MATERIALS, 2020, 2 (01) : 120 - 125
  • [3] Surface reactions in the chemical vapor deposition of highly transparent and conductive fluorine-doped zinc oxide
    Gordon, RG
    Liang, HF
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1998, 216 : U718 - U718
  • [4] Aerosol Assisted Chemical Vapor Deposition of Transparent Conductive Zinc Oxide Films
    Bhachu, Davinder S.
    Sankar, Gopinathan
    Parkin, Ivan P.
    CHEMISTRY OF MATERIALS, 2012, 24 (24) : 4704 - 4710
  • [5] Highly conductive and transparent Ti-doped zinc oxide thin films
    Lu, YM
    Tsai, SI
    Chang, CM
    FLEXIBLE ELECTRONICS-MATERIALS AND DEVICE TECHNOLOGY, 2003, 769 : 349 - 357
  • [6] Highly Transparent Conductive Gallium-Doped Zinc Oxide Thin Films Grown by Reactive Plasma Deposition for Silicon Heterojunction Solar Cells
    Chen, Xinliang
    Wang, Xiaofeng
    Liang, Bingquan
    Sun, Aixin
    Li, Diannan
    Wang, Zheng
    Hu, Liyuan
    Zhang, Dekun
    Ren, Huizhi
    Hou, Guofu
    Zhao, Ying
    Zhang, Xiaodan
    Qu, Minghao
    Yin, Shi
    Ru, Xiaoning
    Yang, Miao
    Xu, Xixiang
    ACS APPLIED ELECTRONIC MATERIALS, 2024, 6 (11) : 8488 - 8496
  • [7] DOPED ZINC OXIDE THIN FILMS AS TRANSPARENT CONDUCTIVE ELECTRODES
    Nistor, M.
    ROMANIAN REPORTS IN PHYSICS, 2012, 64 : 1313 - 1322
  • [8] Aerosol-Assisted Chemical Vapor Deposition of Transparent Conductive Gallium-Indium-Oxide Films
    Knapp, Caroline E.
    Hyett, Geoffrey
    Parkin, Ivan P.
    Carmalt, Claire J.
    CHEMISTRY OF MATERIALS, 2011, 23 (07) : 1719 - 1726
  • [9] Chemical vapor deposition of epitaxial zinc oxide thin films on gallium nitride/sapphire substrates
    Hou, WC
    Lin, BW
    Chang, L
    Lin, TS
    Lin, CW
    11TH INTERNATIONAL CONFERENCE ON II-VI COMPOUNDS (II-VI 2003), PROCEEDINGS, 2004, 1 (04): : 856 - 859
  • [10] Highly conductive and transparent aluminum-doped zinc oxide thin films prepared by pulsed laser deposition in oxygen ambient
    Singh, AV
    Mehra, RM
    Buthrath, N
    Wakahara, A
    Yoshida, A
    JOURNAL OF APPLIED PHYSICS, 2001, 90 (11) : 5661 - 5665
12345