Numerical simulation of LEC growth of InP crystal with an axial magnetic field

被引:7
作者
Li, MW [1 ]
Liu, CM
Wang, PQ
机构
[1] Chongqing Univ, Inst Power Engn, Chongqing 400044, Peoples R China
[2] Henan Univ Sci & Technol, Inst Vehicle & Mot Power Engn, Luoyang 471003, Peoples R China
[3] Chongqing Univ, Bioengn Inst, Chongqing 400044, Peoples R China
基金
中国国家自然科学基金;
关键词
LEC; InP; magnetic field; fluid flow; heat transfer; thermal stress;
D O I
10.1016/j.ijheatmasstransfer.2005.09.033
中图分类号
O414.1 [热力学];
学科分类号
摘要
A set of numerical analyses for momentum, heat transfer and thermal stress for a 3 in. diameter liquid encapsulant Czochralski growth of single-crystal InP with an axial magnetic field is carried out by using the finite element method. Firstly, convective and conductive heat transfers, radiative heat transfer between diffuse surfaces and the Navier-Stokes equations for both melt and encapsulant and electric current stream function equations for the melt and crystal are all combined and solved simultaneously. The thermal stress distribution in the crystal is calculated by using the obtained temperature field. The effects of some process parameters on flow, heat transfer, growing interface shape and thermal stress are investigated. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1738 / 1746
页数:9
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