Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O3 microcantilever using a direct patternable sol-gel method -: art. no. 042904

被引：18
作者：
Kang, GY
Bae, SW
Park, HH
Kim, TS
机构：
[1] Yonsei Univ, Dept Ceram Engn, Seoul 120749, South Korea
[2] Korea Inst Sci & Technol, Microsyst Res Ctr, Seoul 136791, South Korea
来源：
APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 04期
关键词：
D O I：
10.1063/1.2168261
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on SiNx/Ta/Pt/PZT/Pt/SiO2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hz/ng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.
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页码：1 / 3
页数：3
相关论文
共 12 条
[1]   Release of multi-layer metal structure in MEMS devices by dry etching technique [J].
Das, NC .
SOLID-STATE ELECTRONICS, 2002, 46 (04) :501-504
[2]   Optically, defined multifunctional patterning of photosensitive thin-film silica mesophases [J].
Doshi, DA ;
Huesing, NK ;
Lu, MC ;
Fan, HY ;
Lu, YF ;
Simmons-Potter, K ;
Potter, BG ;
Hurd, AJ ;
Brinker, CJ .
SCIENCE, 2000, 290 (5489) :107-111
[3]  
Ha SM, 2001, FERROELECTRICS, V263, P1635
[4]  
Ha SM, 2002, FERROELECTRICS, V273, P2729
[5]   Dry-etching mechanism of sputtered Pb(Zr1-xTix)O-3 film [J].
Ikegami, N ;
Matsui, T ;
Kanamori, J .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (4B) :2505-2511
[6]  
Kohler M., 1999, ETCHING MICROSYSTEM
[7]   Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution [J].
Marson, S ;
Dorey, RA ;
Zhang, Q ;
Whatmore, RW .
INTEGRATED FERROELECTRICS, 2003, 54 :585-593
[8]   INTEGRATED FERROELECTRIC MICROELECTROMECHANICAL SYSTEMS (MEMS) [J].
POLLA, DL ;
SCHILLER, PJ .
INTEGRATED FERROELECTRICS, 1995, 7 (1-4) :359-370
[9]   Microelectromechanical systems based on ferroelectric thin films [J].
Polta, DL .
MICROELECTRONIC ENGINEERING, 1995, 29 (1-4) :51-58
[10]   Gas sensors based on piezoelectric micro-diaphragm transducer [J].
Shin, S ;
Paik, JK ;
Lee, NE ;
Park, HD ;
Park, JS ;
Lee, J .
INTEGRATED FERROELECTRICS, 2005, 69 :333-339
12