Current - Voltage properties of piezoelectric thin film ZnO in a micromechanical force sensor

被引：0

作者：

Yuan, W ^{[1
]}

Smits, JG ^{[1
]}

Dominguez, P ^{[1
]}

Cantor, CR ^{[1
]}

Smith, CL ^{[1
]}

机构：

[1] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA

来源：

1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2 | 1998年

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A piezoelectric thin film of ZnO was investigated as the active piezoelectric material for a novel force sensor in DNA sequencing. Current-voltage measurements (I-V measurements) were carried out for the electrical characterization. It was found that the I-V curves are not only nonlinear, they are also irreversible and dependent on the electrical history. A model that explains the observed phenomena qualitatively is presented.

引用

页码：593 / 596

页数：4

共 13 条

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