STRUCTURAL, OPTICAL AND ELECTRICAL PROPERTIES OF Al-DOPED ZnO TRANSPARENT CONDUCTING OXIDE FOR SOLAR CELL APPLICATIONS

被引：6

作者：

Cher, W. ^{[1
]}

Yick, S. ^{[2
,3
]}

Xu, S. ^{[1
]}

Han, Z. J. ^{[3
]}

Ostrikov, K. ^{[2
,3
]}

机构：

[1] Nanyang Technol Univ, Natl Inst Educ, Plasma Sources & Applicat Ctr, Singapore 637616, Singapore

[2] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia

[3] CSIRO Mat Sci & Engn, PNCA, Lindfield, NSW 2070, Australia

来源：

FUNCTIONAL MATERIALS LETTERS | 2011年 / 4卷 / 04期

基金：

澳大利亚研究理事会; 新加坡国家研究基金会;

关键词：

Al-doped ZnO; optical transmittance; electrical conductivity; THIN-FILMS; SUBSTRATE-TEMPERATURE; BAND-GAP; GROWTH; DYE; NANOWIRES;

D O I：

10.1142/S1793604711002330

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Al-doped zinc oxide (AZO) thin films are deposited onto glass substrates using radio-frequency reactive magnetron sputtering and the improvements in their physical properties by post-synthesis thermal treatment are reported. X-ray diffraction spectra show that the structure of films can be controlled by adjusting the annealing temperatures, with the best crystallinity obtained at 400 degrees C under a nitrogen atmosphere. These films exhibit improved quality and better optical transmittance as indicated by the UV-Vis spectra. Furthermore, the sheet resistivity is found to decrease from 1.87 x 10(-3) to 5.63 x 10(-4) Omega . cm and the carrier mobility increases from 6.47 to 13.43 cm(2) . V-1 . s(-1) at the optimal annealing temperature. Our results demonstrate a simple yet effective way in controlling the structural, optical and electrical properties of AZO thin films, which is important for solar cell applications.

引用

页码：401 / 405

页数：5

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