Buoyant convection during the growth of compound semiconductors by the liquid-encapsulated Czochralski process with an axial magnetic field and with a non-axisymmetric temperature

被引:6
作者
Ma, N
Walker, JS
机构
[1] Department of Mechanical and Industrial Engineering, University of Illinois, Urbana, IL, 61801
来源
JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME | 1996年 / 118卷 / 01期
关键词
D O I
10.1115/1.2817494
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
This paper treats the buoyant convection of a molten semiconductor in a cylindrical crucible with a vertical axis, with a uniform vertical magnetic field, and with a nonaxisymmetric temperature. Moss previous treatments of melt motions with vertical magnetic fields have assumed that the temperature and buoyant convection were axisymmetric. In reality, the temperature and resultant buoyant convection often deviate significantly from axisymmetry. For a given non-axisymmetric temperature, the electromagnetic suppression of the axisymmetric part of the buoyant convection is stronger than that of the non-axisymmetric part, so that the deviation from an axisymmetric melt motion increases as the magnetic field strength is increased. The non-axisymmetric part of the buoyant convection includes relatively strong azimuthal velocities adjacent to the electrically insulating vertical crucible wall, because this wall blocks the radial electric currents needed to suppress azimuthal velocities.
引用
收藏
页码:155 / 159
页数:5
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