Monte Carlo simulations of the transport of sputtered particles

被引：15

作者：

Macàk, K ^{[1
]}

Macàk, P ^{[1
]}

Helmersson, U ^{[1
]}

机构：

[1] Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden

来源：

COMPUTER PHYSICS COMMUNICATIONS | 1999年 / 120卷 / 2-3期

基金：

瑞典研究理事会;

关键词：

Monte Carlo; magnetron sputtering; deposition;

D O I：

10.1016/S0010-4655(99)00245-3

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

Program SPATS models the transport of neutral particles during magnetron sputtering deposition. The 3D Monte Carlo simulation provides information about spatial distribution of the fluxes, density of the sputtered particles in the chamber glow discharge area, and kinetic energy distribution of the arrival flux. Collision events are modelled by scattering in Biersack's potential, Lennard-Jones potential, or by binary hard sphere collision approximation, The code has an interface for Monte Carlo TRIM simulated results of the sputtered particles. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：238 / 254

页数：17

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