Replication of nano/micro-scale features using bulk metallic glass mold prepared by femtosecond laser and imprint processes

被引：13

作者：

Chen, Y. C. ^{[1
]}

Chu, J. P. ^{[1
]}

Jang, J. S. C. ^{[2
]}

Hsieh, C. W. ^{[3
]}

Yang, Y. ^{[4
]}

Li, C. L. ^{[5
]}

Chen, Y. M. ^{[1
]}

Jeng, J. Y. ^{[3
]}

机构：

[1] Natl Taiwan Univ Sci & Technol, Dept Mat Sci & Engn, Taipei 10607, Taiwan

[2] Natl Cent Univ, Dept Mech Engn, Inst Mat Sci & Engn, Chungli 32001, Taiwan

[3] Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei 10607, Taiwan

[4] City Univ Hong Kong, Dept Mech & Biomed Engn, Ctr Adv Struct Mat, Kowloon, Hong Kong, Peoples R China

[5] Natl Taiwan Univ Sci & Technol, Grad Inst Appl Sci & Technol, Taipei 10607, Taiwan

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2013年 / 23卷 / 03期

关键词：

ABLATION;

D O I：

10.1088/0960-1317/23/3/035030

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study describes the replication of nano/micro-scale features using a Pd40Ni40P20 bulk metallic glass (BMG) mold prepared using a femtosecond laser and nanoimprinting process. The use of the beam shaper feature of the femtosecond laser enabled the rapid fabrication of periodic nanostripes over an area of similar to 5 x 4 mm(2) on the BMG mold following a single pulse of irradiation. The ablation pitch of the nanostructure irradiated with 100 mW of femtosecond laser power was determined to be 175.8 nm. The imprinting results demonstrate the applicability of Pd-based BMG in the replication of mold features ranging from 100 mu m to 90 nm. Additionally, Pd-based BMG can itself be used as a mold to transfer features onto Au-based BMG and polydimethylsiloxane, where the results could be used to ascertain the workability of BMG for molding in a nano/micro-imprint process.

引用

页数：8

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