New phase of sp3-bonded BN:: The 5H polytype

被引:21
作者
Komatsu, S
Okada, K
Shimizu, Y
Moriyoshi, Y
机构
[1] Natl Inst Res Inorgan Mat, Tsukuba, Ibaraki 3050044, Japan
[2] Hosei Univ, Coll Engn, Dept Mat Sci, Tokyo 1848584, Japan
来源
JOURNAL OF PHYSICAL CHEMISTRY B | 1999年 / 103卷 / 17期
关键词
D O I
10.1021/jp9844664
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A new phase of sp(3)-bonded BN, that is, 5H polytype, has been found. The representative lattice parameters a and c were determined to be 2.528 and 10.407 Angstrom, respectively. The new BN phase was prepared by chemical vapor deposition assisted with 193 nm laser irradiation of the surface. Source gases were diborane and ammonia diluted in argon and hydrogen. The substrate temperature was 850 degrees C.
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页码:3289 / 3291
页数:3
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