Analyses of the SnIX-Sn XII spectra in the EUV region

被引：79
作者：
Churilov, SS [1 ]
Ryabtsev, AN [1 ]
机构：
[1] Russian Acad Sci, Inst Spect, Troitsk 142190, Moscow Region, Russia
来源：
PHYSICA SCRIPTA | 2006年 / 73卷 / 06期
关键词：
D O I：
10.1088/0031-8949/73/6/014
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The Sn IX - Sn XII spectra excited in a vacuum spark have been analysed in the 130 - 160 angstrom wavelength region. The analysis was based on the energy parameter extrapolation in the isonuclear Sn VI - VIII and Sn XIII - XIV sequence. 266 spectral lines belonging to the 4d(m) -(4d(m-1)4f + 4p(5)4d(m+1)) ( m = 6 - 3) transition arrays were classified in the Sn IX - Sn XII spectra for the first time. All 18 level energies of the 4d(3) configuration and 39 level energies of the strongly interacting 4d(2)4f and 4p(5)4d(4) configurations were established in the Sn XII spectrum. The energy differences between the majority of the 4dm levels and about 40 levels of the 4d(m-1)4f + 4p(5)4d(m+1) configurations were determined in each of the Sn IX, Sn X and Sn XI spectra ( m = 6 - 4). As a result, all intense lines were classified in the 130 - 140 angstrom region relevant to the extreme ultraviolet (EUV) lithography. It was shown that the most of the intense lines in the 2% bandwidth at 135 angstrom belong to the transitions in the Sn XI - Sn XIII spectra.
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页码：614 / 619
页数：6
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