Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches

被引：2

作者：

Sakata, Tomomi ^{[1
]}

Sassa, Fumihiro ^{[1
]}

Usui, Mitsuo ^{[1
]}

Kodate, Junichi ^{[1
]}

Ishii, Hiromu ^{[1
]}

Machida, Katsuyuki ^{[2
]}

Jin, Yoshito ^{[1
]}

机构：

[1] NTT Corp, NTT Microsyst Integrat Labs, Atsugi, Kanagawa 2430198, Japan

[2] NTT Adv Technol Corp, Atsugi, Kanagawa 2430124, Japan

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2013年 / 37卷 / 04期

关键词：

Monolithic; MEMS; Electrical interference; WSS; FABRICATION PROCESS;

D O I：

10.1016/j.precisioneng.2013.05.008

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference. (C) 2013 Elsevier Inc. All rights reserved,

引用

页码：897 / 901

页数：5

共 20 条

[1] Wavelength add-drop switching using tilting micromirrors [J].

Ford, JE ;

Aksyuk, VA ;

Bishop, DJ ;

Walker, JA .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1999, 17 (05) :904-911

[2] Evaluation of polarization mode dispersion in a telecommunication wavelength selective switch using quantum interferometry [J].

Fraine, A. ;

Minaeva, O. ;

Simon, D. S. ;

Egorov, R. ;

Sergienko, A. V. .

OPTICS EXPRESS, 2012, 20 (03) :2025-2033

[3] Fabrication of optical microelectromechanical-system switches having multilevel mirror-drive electrodes [J].

Ishii, H ;

Urano, M ;

Tanabe, Y ;

Shimamura, T ;

Yamaguchi, J ;

Kamei, T ;

Kudou, K ;

Yano, M ;

Uenishi, Y ;

Machida, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (9A) :6468-6472

[4] Development of Hierarchical Optical Path Cross-Connect Systems Employing Wavelength/Waveband Selective Switches [J].

Ishii, Kiyo ;

Mitsui, Shin-ichi ;

Hasegawa, Hiroshi ;

Sato, Ken-ichi ;

Kamei, Shin ;

Okuno, Masayuki ;

Takahashi, Hiroshi .

JOURNAL OF OPTICAL COMMUNICATIONS AND NETWORKING, 2011, 3 (07) :559-567

[5] Novel structure and fabrication process for integrated RF microelectromechanical-system technology [J].

Kuwabara, Kei ;

Urano, Masami ;

Kodate, Junichi ;

Sato, Norio ;

Morimura, Hiroki ;

Sakata, Tomomi ;

Ishii, Hiromu ;

Kamei, Toshikazu ;

Kudou, Kazuhisa ;

Yano, Masaki ;

Machida, Katsuyuki .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (9A) :6849-6853

[6] Wavelength-Selective Switch Based on a Polarization-Independent Transmission Grating and a High Fill-Factor Micromirror Array [J].

Li, Sihua ;

Wan, Zhujun ;

Xu, Jing ;

Zhong, Shaolong ;

Wu, Yaming .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2011, 23 (17) :1249-1251

[7] Wavelength-selective 1 x K switches using free-space optics and MEMS micromirrors:: Theory, design, and implementation [J].

Marom, DM ;

Neilson, DT ;

Greywall, DS ;

Pai, CS ;

Basavanhally, NR ;

Aksyuk, VA ;

López, DO ;

Pardo, F ;

Simon, ME ;

Low, Y ;

Kolodner, P ;

Bolle, CA .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2005, 23 (04) :1620-1630

[8] Synchronized Multiple-Array Vibrational Device for Microelectromechanical System Electrostatic Energy Harvester [J].

Ono, Kazuyoshi ;

Sato, Norio ;

Shimamura, Toshishige ;

Ugajin, Mamoru ;

Sakata, Tomomi ;

Mutoh, Shin'ichiro ;

Kodate, Junichi ;

Jin, Yoshito ;

Sato, Yasuhiro .

JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (05)

[9] Fabrication of a Microelectromechanical System Mirror Array and Its Drive Electrodes for Low Electrical Interference in Wavelength-Selective Switches [J].

Sakata, Tomomi ;

Usui, Mitsuo ;

Uchiyama, Shingo ;

Shimoyama, Nobuhiro ;

Kodate, Junichi ;

Ishii, Hiromu ;

Matsuura, Tohru ;

Shimokawa, Fusao ;

Sato, Yasuhiro .

IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 2011, 6 (04) :384-389

[10] Monolithic integration fabrication process of thermoelectric and vibrational devices for microelectromechanical system power generator [J].

Sato, Norio ;

Kuwabara, Kei ;

Ono, Kazuyoshi ;

Sakata, Tomomi ;

Morimura, Hiroki ;

Terada, Jun ;

Kudou, Kazuhisa ;

Kamei, Toshikazu ;

Yano, Masaki ;

Machida, Katsuyuki ;

Ishii, Hiromu .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (9A) :6062-6067

← 1 2 →