Defect reduction in (11-22) semipolar GaN with embedded InN islands on m-plane sapphire

被引:13
作者
Jung, Chilsung [1 ]
Jang, Jongjin [1 ]
Hwang, Junghwan [1 ]
Jeong, Joocheol [1 ]
Kim, Jinwan [1 ]
Lee, Kyungjae [1 ]
Nam, Okhyun [1 ]
机构
[1] Korea Polytech Univ, LED Technol Ctr, Dept Nanoopt Engn, Shihung 429793, South Korea
基金
新加坡国家研究基金会;
关键词
Nanostructures; Metalorganic chemical vapor deposition; Nitrides; Semiconducting indium compounds; Light emitting diode; VAPOR-PHASE EPITAXY; QUANTUM DOTS; SCATTERING; GROWTH;
D O I
10.1016/j.jcrysgro.2012.09.022
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
This paper reports on the improved properties of semipolar (11-22) GaN with embedded InN islands on m-plane sapphire substrate. The crystal quality of GaN grown over embedded InN islands was improved by the defect blocking mechanism that the InN islands stop from propagating of dislocations. The full width at half maximum (FWHM) of X-ray rocking curves for the on- and off-axes planes of GaN with embedded InN islands significantly narrowed. The photoluminescence (PL) intensity of GaN with embedded InN islands increased by 28% compared with that of GaN without InN islands (reference GaN). The n-type GaN carrier mobility was analyzed by using temperature-dependent Hall effect measurement. The increase in peak mobility at 350 K from 104 to 113 cm(2)/Vs with embedded islands also suggested the effectiveness of embedded InN islands in GaN. LEDs fabricated on (11-22) GaN with embedded InN islands showed approximately 2.7 times higher optical output power than the reference LED at 100 mA. (c) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:26 / 29
页数:4
相关论文
共 29 条
[1]   Spontaneous polarization and piezoelectric constants of III-V nitrides [J].
Bernardini, F ;
Fiorentini, V ;
Vanderbilt, D .
PHYSICAL REVIEW B, 1997, 56 (16) :10024-10027
[2]   Quantum-confined Stark effect in an AlGaN/GaN/AlGaN single quantum well structure [J].
Deguchi, T ;
Sekiguchi, K ;
Nakamura, A ;
Sota, T ;
Matsuo, R ;
Chichibu, S ;
Nakamura, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (8B) :L914-L916
[3]   Growth and characterisation of semi-polar (11(2)over-bar-2) InGaN/GaN MQW structures [J].
Kappers, M. J. ;
Hollander, J. L. ;
McAleese, C. ;
Johnston, C. F. ;
Broom, R. F. ;
Barnard, J. S. ;
Vickers, M. E. ;
Humphreys, C. J. .
JOURNAL OF CRYSTAL GROWTH, 2007, 300 (01) :155-159
[4]   Photoluminescence properties of self-assembled InN dots embedded in GaN grown by metal organic vapor phase epitaxy [J].
Ke, W. C. ;
Fu, C. P. ;
Chen, C. Y. ;
Lee, L. ;
Ku, C. S. ;
Chou, W. C. ;
Chang, W. -H. ;
Lee, M. C. ;
Chen, W. K. ;
Lin, W. J. ;
Cheng, Y. C. .
APPLIED PHYSICS LETTERS, 2006, 88 (19)
[5]   Filtering of Defects in Semipolar (11-22) GaN Using 2-Steps Lateral Epitaxial Overgrowth [J].
Kriouche, N. ;
Leroux, M. ;
Vennegues, P. ;
Nemoz, M. ;
Nataf, G. ;
de Mierry, P. .
NANOSCALE RESEARCH LETTERS, 2010, 5 (12) :1878-1881
[6]   Stacking faults blocking process in (11-22) semipolar GaN growth on sapphire using asymmetric lateral epitaxy [J].
Kriouche, N. ;
Vennegues, P. ;
Nemoz, M. ;
Nataf, G. ;
De Mierry, P. .
JOURNAL OF CRYSTAL GROWTH, 2010, 312 (19) :2625-2630
[7]   Regrowth of Semipolar GaN on Nanoporous GaN Template by Metal Organic Chemical Vapor Deposition [J].
Lee, Dong-Hun ;
Jang, Jong-Jin ;
Kong, Bo-Hyun ;
Cho, Hyung-Koun ;
Nam, Okhyun .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (05) :0580011-0580012
[8]   Improved performance of GaN-based light-emitting diodes with high-quality GaN grown on InN islands [J].
Lee, Sang-Jun ;
Cho, Chu-Young ;
Hong, Sang-Hyun ;
Han, Sang-Heon ;
Yoon, Sukho ;
Park, Yongjo ;
Park, Seong-Ju .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (42)
[9]   Effect of defects on the luminescence in semipolar InGaN/GaN quantum wells on planar and patterned m-plane sapphire substrate [J].
Lee, Seunga ;
Jang, Jongjin ;
Lee, Kwan-Hyun ;
Hwang, Jung-Hwan ;
Jeong, Joocheol ;
Nam, Okhyun .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2012, 209 (08) :1526-1529
[10]   Structural and optical characterization of (11-22) semipolar GaN on m-plane sapphire without low temperature buffer layer [J].
Lee, Sung-Nam ;
Kim, K. K. ;
Nam, O. H. ;
Kim, J. H. ;
Kim, H. .
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7, NO 7-8, 2010, 7 (7-8)