Surface Patterning by Three-Beam Laser Interference Lithography

被引：0
作者：
Danylov, A. [1 ]
Ilchuk, H. [2 ]
Petrus, R. [2 ]
机构：
[1] Lviv Polytech Natl Univ, Dept Appl Phys & Nanomat Sci, Lvov, Ukraine
[2] Lviv Polytech Natl Univ, Dept Gen Phys, Lvov, Ukraine
来源：
PROCEEDINGS OF THE 2017 IEEE 7TH INTERNATIONAL CONFERENCE NANOMATERIALS: APPLICATION & PROPERTIES (NAP) | 2017年
关键词：
periodic structures; laser interference lithography; multibeam interference pattern; microstructure fabrication;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The approach based on laser interference lithography aimed on periodic structure formation on the surface of solid is considered. Light intensity spatial distribution at the laser target surface for three laser beam interference was calculated for various polarization modes and angles of incidence and azimuth angles. The features of resulting interference patterns were determined and reasons of the peculiarities were discussed.
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页数：4
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