Simulation of Thick Film PZT Actuators with Interdigitated Electrodes

被引：3

作者：

Zaki, Mohanad Mohammed ^{[1
]}

Zaehringer, Sandy ^{[1
]}

Schwesinger, Norbert ^{[1
]}

机构：

[1] Tech Univ Munich, FG Mikrostrukturierte Mechatron Syst, D-80290 Munich, Germany

来源：

SMART SENSORS, ACTUATORS, AND MEMS VI | 2013年 / 8763卷

关键词：

Interdigitated electrodes; thick film; piezoelectric non-linearity; micro actuator; FEM-simulation;

D O I：

10.1117/12.2017411

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper deals with the simulation of membrane actuators based on thick film piezoelectric ceramics with interdigitated electrodes using the finite element method. A modified piezoelectric coupling matrix is introduced to account for the piezoelectric non-linearity due to poling and actuation at high electric fields. Electrodes were fabricated on top of 250 mu m thick PZT substrates which were characterized. The experimental data verified the simulation results and proved the necessity of the modified coupling matrix.

引用

页数：8