The carbon nanotubes films on various type of porous Si substrate were prepared. Three methods of porous Si preparation electrolysis, wet etching with silver nitrate and with potassium hydroxide were used. CNTs films were obtained by two step method containing PVD and CVD process. These yield of field emission depended on the type of film. I-U characteristics and F-N plots are discussed for these films. The short-term stability of emission measurements results are also presented. Depending on technological parameters of Si etching the topography of samples is different and it affects on the emission currents intensity and the electric threshold field. The influence of substrate topography on adhesion of CNT film was also studied.