Low-temperature Preparation and Performance Research of Nano-Al2O3/TiO2 Multilayer Coating

Nano-Al2O3/TiO2 multilayer coatings are deposited on the surface of cemented carbide tools at a low temperature of 200 degrees C by atomic layer deposition (ALD). The adhesion of coating-substrate and the cutting performance of different nano-Al2O3/TiO2 multilayer coating tools are studied by SEM, and three-scratch tester dynamometer and CNC machine tools. The results show that the adhesion of coating-substrate of the nano-multilayer coating tool prepared at low temperature based on atomic layer deposition technology is high. The number of coating layers, coating deposition sequence and coating layer thickness ratio have varying degrees of influence on the cutting force of the nano-multilayer coating tool. The nano-multilayer coating tool is more suitable for high-speed cutting. When the cutting speed is more than 2.33 m / s, the cutting force and friction factor of the nano-multilayer coating tool show a downward trend and good cutting performance. The cutting performance of the double-layer nano-coated tool is better. In high-speed cutting, the surface friction factor of the nano-multilayer coating tool is lower than that of the ordinary uncoated cemented carbide tool, the nano-Al2O3/TiO2 multilayer coating can effectively reduce the bonding wear of the tool and the phenomenon of tool-chip sticking and "scalding", which can improve the wear resistance of the tool surface.