Ceramic thin film thermocouples for SiC-based ceramic matrix composites

被引：57

作者：

Wrbanek, John D. ^{[1
]}

Fralick, Gustave C. ^{[1
]}

Zhu, Dongming ^{[1
]}

机构：

[1] NASA, Glenn Res Ctr, Cleveland, OH 44135 USA

来源：

THIN SOLID FILMS | 2012年 / 520卷 / 17期

关键词：

Thermocouples; Thin films; Indium oxides; Zinc oxides; Ceramic matrix composites; High temperature environments; RESISTIVITY; COATINGS; MULLITE;

D O I：

10.1016/j.tsf.2012.04.034

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Conductive ceramic thin film thermocouples were investigated for application to silicon carbide fiber reinforced silicon carbide ceramic matrix composite (SiC/SiC CMC) components. High temperature conductive oxides based on indium and zinc oxides were selected for testing to high temperatures in air. Sample oxide films were first sputtered-deposited on alumina substrates then on SiC/SiC CMC sample disks. Operational issues such as cold junction compensation to a 0 degrees C reference, resistivity and thermopower variations are discussed. Results show that zinc oxides have an extremely high resistance and thus increased complexity for use as a thermocouple, but thermocouples using indium oxides can achieve a strong, nearly linear response to high temperatures. Published by Elsevier B.V.

引用

页码：5801 / 5806

页数：6

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