[1] Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China
[2] Chinese Acad Sci, Beijing Inst Nanoenergy & Nanosyst, CAS Ctr Excellence Nanosci, Beijing Key Lab Micronano Energy & Sensor, Beijing 101400, Peoples R China
[3] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China
[4] Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China
[5] Univ Chinese Acad Sci, Sch Nanosci & Technol, Beijing 100049, Peoples R China