Instability analysis of torsional MEMS/NEMS actuators under capillary force

被引：49

作者：

Guo, Jian-Gang ^{[2
]}

Zhou, Li-Jun ^{[3
]}

Zhao, Ya-Pu ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China

[2] Tianjin Univ, Dept Mech, Tianjin 300072, Peoples R China

[3] Tianjin Univ Technol & Educ, Dept Mech Engn, Tianjin 300222, Peoples R China

来源：

JOURNAL OF COLLOID AND INTERFACE SCIENCE | 2009年 / 331卷 / 02期

基金：

中国国家自然科学基金;

关键词：

Torsional NEMS actuator; Capillary force; Instability; Bifurcation; NANOSCALE ELECTROSTATIC ACTUATORS; VAN-DER-WAALS; CASIMIR FORCE; STABILITY; BEHAVIOR; PLATES;

D O I：

10.1016/j.jcis.2008.11.069

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The static and dynamic instabilities of a torsional MEMS/NEMS actuator caused by capillary effects are studied, respectively. An instability number, eta, is defined, and the critical gap distance, g(cr), between the mainplate and the substrate is derived. According to the values of eta and g, the instability criteria of the actuator are presented. The dimensionless motion equation of the MEMS/NEMS torsional actuator is derived when it makes nonlinear oscillation under capillary force. The qualitative analysis of the nonlinear equation is made, and the phase portraits are presented on the phase plane. In addition, the bifurcation phenomena in the system are also analyzed. (C) 2008 Elsevier Inc. All rights reserved.

引用

页码：458 / 462

页数：5

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