Charge state distributions of Al and Cr cathodic arc plasmas

被引：0

作者：

Franz, R. ^{[1
]}

Wallig, J. ^{[1
]}

Polcik, P. ^{[2
]}

Anders, A. ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, 1 Cyclotron Rd, Berkeley, CA 94720 USA

[2] PLANSEE Composite Mat, D-86983 Munich, Germany

来源：

25TH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM (ISDEIV 2012) | 2012年

基金：

奥地利科学基金会;

关键词：

TEMPORAL DEVELOPMENT; ION; FLUCTUATIONS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Ion charge state distributions of pulsed arcs have been measured for Al and Cr cathodes in vacuum and different background gases. The distance from the cathode to the extraction grid of the time-of-flight spectrometer was varied, and measurements were repeated to assess the statistical fluctuations that are typical for arc operation. The results represent a baseline for future studies that aim to include composite cathodes in reactive environments as used for synthesising state-of-the-art hard coatings.

引用

页码：541 / 544

页数：4

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