Mechanically tunable three-dimensional elastomeric network/air structures via interference lithography

被引:86
作者
Jang, JH
Ullal, CK
Gorishnyy, T
Tsukruk, VV
Thomas, EL
机构
[1] MIT, Dept Mat Sci & Engn, Inst Soldier Nanotechnol, Cambridge, MA 02139 USA
[2] Iowa State Univ, Dept Mat Sci & Engn, Ames, IA 50011 USA
关键词
D O I
10.1021/nl052577q
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We show how to employ an interference lithographic template (ILT) as a facile mold for fabricating three-dimensional bicontinuous PDMS (poly(dimethylsiloxane)) elastomeric structures and demonstrate the use of such a structure as a mechanically tunable PDMS/air phononic crystal. A positive photoresist was used to make the ILT, and after infiltration with PDMS, the resist was removed in a water-based basic solution which avoided PDMS swelling or pattern collapse occurring during the ILT removal process. Since the period of the structure is approximately 1 mu m, the density of states of gigahertz phonons are altered by the phononic PDMS/air crystal. Brillouin light scattering (BLS) was employed to measure phononic modes of the structure as a function of mechanical strain. The results demonstrate that the phononic band diagram of such structures can be tuned mechanically.
引用
收藏
页码:740 / 743
页数:4
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