Engineering SOI Substrates for RF to mmWave Front-Ends

被引:0
作者
Allibert, F. [1 ]
Andia, L. [1 ]
Morandini, Y. [1 ]
Veytizou, C. [1 ]
Rack, M. [2 ]
Nyssens, L. [2 ]
Raskin, J. P. [2 ]
Augendre, E. [3 ,4 ]
机构
[1] Soitec, Bernin, France
[2] Catholic Univ Louvain, ICTEAM, Louvain La Neuve, Belgium
[3] CEA, LETI, Grenoble, France
[4] Univ Alpes Grenoble, Grenoble, France
关键词
Millimeter waves;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article illustrates how substrate engineering brings additional linearity and value for RF and mm-wave applications. Measurement setup and extraction procedures enable evaluating the substrate performance through representative metrics. With a physical understanding of material properties, the EM behavior of the substrates can be accurately modeled, reproducing the effects of material parameters on HD.
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页码:72 / 84
页数:13
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