Low temperature growth of epitaxial CdSe thin films by an isothermal closed space sublimation technique using two elemental sources

We present a novel low-cost technique for the epitaxial growth of thin films. Using a closed space isothermal vapor phase technique, we have grown CdSe thin films on GaAs (100) substrates. The epitaxial growth is performed by exposing the substrate to Cd and Se vapor from elemental sources in a cycled manner. The thermodynamic and kinetic aspects of the process are discussed, X-ray diffraction patterns confirm the epitaxial growth of CdSe films on the GaAs substrates. AFM images were obtained re, study the film morphologies. (C) 1999 Published by Elsevier Science S.A. All rights reserved.