Piezoelectric Acoustic MEMS Sensor based Electrical Machines Condition Monitoring -Diaphragm Design Analysis

被引：0

作者：

Hegde, Vasudha ^{[1
]}

Veena, S. ^{[1
]}

Ravikumar, H. M. ^{[1
]}

Yellampalli, Siva ^{[2
]}

机构：

[1] Nitte Meenakshi Inst Technol, Dept Elect & Elect Engn, Bangalore, Karnataka, India

[2] VTU Extens Ctr, UTL Technol, Bangalore, Karnataka, India

来源：

2013 INTERNATIONAL CONFERENCE ON CIRCUITS, CONTROLS AND COMMUNICATIONS (CCUBE) | 2013年

基金：

英国工程与自然科学研究理事会;

关键词：

Condition Monitoring; MEMS Sensor; Piezoelectric Material; Diaphragm Design; Resonant Frequency; Comsol Multiphysics;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the effects of diaphragm design parameters on the sensitivity of acoustic sensor used for condition monitoring purpose. We have considered different design parameters of the diaphragm such as shape, dimensions, thickness, type of the piezoelectric material of the diaphragm. We studied the effect of changes in these parameters on the deflection, stress, strain, voltage generated and resonant frequency of the diaphragm which affect the sensitivity of the acoustic sesnsor. The effect of the changes in these parameters on the sensitivity of the signals acquired by the machines has been simulated and analyzed using Comsol Multiphysics tool.

引用

页数：6