Effect of Al dopants on the structural, optical and gas sensing properties of spray-deposited ZnO thin films

被引：41

作者：

Prajapati, C. S. ^{[1
]}

Kushwaha, Ajay ^{[2
]}

Sahay, P. P. ^{[1
]}

机构：

[1] Motilal Nehru Natl Inst Technol, Dept Phys, Allahabad 211004, Uttar Pradesh, India

[2] Indian Inst Technol, Dept Phys, Bombay 400076, Maharashtra, India

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2013年 / 142卷 / 01期

关键词：

Semiconductors; Thin films; Optical properties; Chemisorption; PHOTOLUMINESCENCE; PYROLYSIS; DEFECTS; SENSOR; LPG;

D O I：

10.1016/j.matchemphys.2013.07.015

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Undoped and Al-doped ZnO thin films were deposited on glass substrates by the spray pyrolysis method. The structural, morphological and optical properties of these films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), UV-Vis spectroscopy, photoluminescence (PL) and photoconductivity (PC) measurements, respectively. XRD analyses confirm that the films are polycrystalline zinc oxide with the hexagonal wurtzite structure, and the crystallite size has been found to be in the range 20-40 nm. SEM and AFM analyses reveal that the films have continuous surface without visible holes or faulty zones, and the surface roughness decreases on Al doping. The Al-doped films have been found to be highly transparent (>85%) and show normal dispersion behavior in the wavelength range 450-700 nm. The doped films show only ultraviolet emission and are found to be highly photosensitive. Among all the films examined, at 300 C the 1.0 at% Al-doped film shows the selective high response (98.2%) to 100 ppm acetone concentration over to methanol, ethanol, propan-2-ol, formaldehyde and hydrogen. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：276 / 285

页数：10

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