Fabrication of low loss MOMS resonators for quantum optics experiments

被引：10

作者：

Serra, E. ^{[1
,2
,3
]}

Bagolini, A. ^{[4
]}

Borrielli, A. ^{[2
,5
]}

Boscardin, M. ^{[4
]}

Cataliotti, F. S. ^{[6
,7
,8
]}

Marin, F. ^{[6
,7
,8
]}

Marino, F. ^{[6
,7
,9
]}

Pontin, A. ^{[2
,10
]}

Prodi, G. A. ^{[2
,10
]}

Vannoni, M. ^{[11
]}

Bonaldi, M. ^{[2
]}

机构：

[1] Univ Trento, Interdisciplinary Lab Computat Sci LISC, FBK, I-38123 Povo, Trento, Italy

[2] Ist Nazl Fis Nucl, Grp Coll Trento, Sez Padova, I-38123 Povo, Trento, Italy

[3] DIMES, ECTM, Dept Microelect & Comp,Engn, NL-2600 GB Delft, Netherlands

[4] Microtechnol Lab FBK CMM, I-38123 Povo, Trento, Italy

[5] Nanosci Trento FBK Div, Inst Mat Elect & Magnetism, I-38123 Povo, Trento, Italy

[6] European Lab Non Linear Spect LENS, I-50019 Sesto Fiorentino, FI, Italy

[7] Ist Nazl Fis Nucl, Sez Firenze, I-50019 Sesto Fiorentino, FI, Italy

[8] Univ Florence, Dipartimento Fis & Astron, I-50019 Sesto Fiorentino, FI, Italy

[9] CNR Ist Sistemi Complessi, I-50019 Sesto Fiorentino, FI, Italy

[10] Univ Trento, Dipartimento Fis, I-38123 Povo, TN, Italy

[11] Ist Nazl Ott CNR, I-50125 Florence, Italy

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2013年 / 23卷 / 08期

基金：

欧洲研究理事会;

关键词：

OPTOMECHANICAL RESONATORS; NOISE REDUCTION; CAVITY; OSCILLATOR; SILICON;

D O I：

10.1088/0960-1317/23/8/085010

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the fabrication and characterization of opto-mechanical micro-resonators developed to detect radiation-pressure coupling between light and a macroscopic body. The major achievements of this work are the development of complex high aspect ratio shapes by using the deep-RIE Bosch process and the integration of a high-reflectivity dielectric mirror. The micro-resonators were used as an end-mirror of a Fabry-Perot cavity, attaining an optical finesse of about 6 x 10(4), and at cryogenic temperature (about 10 K) we measured a mechanical quality factor up to 2 x 10(6) at about 90 kHz. These features make our devices particularly suitable for experiments on quantum-opto-mechanics.

引用

页数：12

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