Paradigm Phase Shift

被引：45
作者：
Chakraborty, Amrita [1 ]
Gupta, Bhaskar [1 ]
机构：
[1] Jadavpur Univ, Dept Elect & Telecommun Engn, Kolkata, India
来源：
IEEE MICROWAVE MAGAZINE | 2017年 / 18卷 / 01期
关键词：
DISTRIBUTED X-BAND; FREQUENCY MICROELECTROMECHANICAL SYSTEMS; RF-MEMS SWITCHES; 2-BIT; DESIGN; OPTIMIZATION; CAPACITOR; COUPLER;
D O I：
10.1109/MMM.2016.2616155
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Microelectromechanical systems (MMS) have been familiar in the field of microelectronics and device technology since 1965, when Harvey C. Nathanson invented the first MMS device (known as the resonant gate transistor). Since that time, MMS have represented a prominent field for academic research, with simplified implementations of several devices such as sensors, transducers, actuators, and accelerometers being fabricated. According to MMS technology, all devices could be fabricated using standard integrated circuit (IC) techniques, with the device?s lateral dimensions normally ranging from a maximum of 500 nm to submicron ranges. © 2000-2012 I.
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页码：22 / 41
页数：20
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