Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition

被引：37

作者：

Lee, Han-Bo-Ram ^{[1
]}

Gu, Gil Ho ^{[1
]}

Son, Jong Yeog ^{[1
]}

Park, Chan Gyung ^{[1
]}

Kim, Hyungjun ^{[1
]}

机构：

[1] POSTECH Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Pohang 790784, South Korea

来源：

SMALL | 2008年 / 4卷 / 12期

关键词：

atomic layer deposition; cobalt; magnetic materials; nanorods; nickel;

D O I：

10.1002/smll.200801074

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO2 and Si substrates by using metal-organic precursors and an NH3 plasma mixed with a suitable amount of SiH4 as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm. the magnetic anisotropy of Co NRs caused by shape anisotropy.

引用

页码：2247 / 2254

页数：8

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