Characterization of nanoparticle flow produced by gas aggregation source

被引：44

作者：

Kousal, Jaroslav ^{[1
]}

Polonskyi, Oleksandr ^{[1
]}

Kylian, Ondfej ^{[1
]}

Choukourov, Andrei ^{[1
]}

Artemenko, Anna ^{[1
]}

Pesicka, Josef ^{[2
]}

Slavinska, Danka ^{[1
]}

Biederman, Hynek ^{[1
]}

机构：

[1] Charles Univ Prague, Fac Macromol Phys, Dept Macromol Phys, Prague 18000, Czech Republic

[2] Charles Univ Prague, Fac Macromol Phys, Dept Phys Mat, Prague 18000, Czech Republic

来源：

VACUUM | 2013年 / 96卷

关键词：

Nanoparticles; Flow; Velocity; Gas aggregation source; BEAM DEPOSITION; NANOCLUSTERS; CLUSTERS; PHASE; FILMS;

D O I：

10.1016/j.vacuum.2013.02.015

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A simple and compact gas aggregation cluster and nanoparticle source based on a planar magnetron (Haberland type) without mass separation was characterized. Such source produces a beam of neutral, positively and negatively charged particles that are dragged by a buffer gas expanding from the aggregation chamber. Sizes, speeds and charges of nanoparticles have been determined using a combination of TEM micrographs, electrostatic deflection setup and numeric modeling. The strong dependence of the velocity of the nanoparticles on their size was confirmed both experimentally and by modeling. (c) 2013 Elsevier Ltd. All rights reserved.

引用

页码：32 / 38

页数：7

共 29 条

[1] Particles as probes for complex plasmas in front of biased surfaces [J].