Theoretical Aspects in the Design of Optical Angular Position Sensing of Tiltable Mirrors

被引：3

作者：

Baumgart, Marcus ^{[1
]}

Tortschanoff, Andreas ^{[1
]}

机构：

[1] CTR Carinthian Tech Res AG, Microsyst Grp, A-9524 Villach, Austria

来源：

INTERNATIONAL JOURNAL OF OPTOMECHATRONICS | 2013年 / 7卷 / 03期

关键词：

analytical equation model; MOEMS mirror; position sensing; tilt angle; MICROMIRROR; ANGLE; MEMS;

D O I：

10.1080/15599612.2013.807529

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Tiltable mirrors, which can be produced in small form factors via MOEMS technology, are widely used for many applications. An independent, accurate and fast feedback of the angle position is demanded by industry. Simple optical tilt angle sensing layouts are analytically described. The concept is based on measuring tilt angle dependent intensity or intensity differences. The performance limits of each layout are evaluated and derived design rules for the best linear behavior are given.

引用

页码：193 / 206

页数：14

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