共 14 条
[2]
Noise processes in nanomechanical resonators
[J].
JOURNAL OF APPLIED PHYSICS,
2002, 92 (05)
:2758-2769
[4]
LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1996, 14 (05)
:2879-2892
[6]
EVADING AMPLIFIER NOISE IN NONLINEAR OSCILLATORS
[J].
PHYSICAL REVIEW LETTERS,
1994, 72 (19)
:2992-2995