Fabrication of hierarchical structures by unconventional two-step imprinting

被引：17

作者：

Shi, Gang ^{[1
]}

Lu, Nan ^{[1
]}

Xu, Hongbo ^{[1
]}

Wang, Yandong ^{[1
]}

Shi, Shoulei ^{[1
]}

Li, Hui ^{[1
]}

Li, Ying ^{[1
]}

Chi, Lifeng ^{[1
,2
,3
]}

机构：

[1] Jilin Univ, Coll Chem, State Key Lab Supramol Struct & Mat, Changchun 130012, Peoples R China

[2] Univ Munster, Ctr Nanotechnol C198eNTech, D-48149 Munster, Germany

[3] Univ Munster, Inst Phys, D-48149 Munster, Germany

来源：

JOURNAL OF COLLOID AND INTERFACE SCIENCE | 2012年 / 368卷

基金：

中国国家自然科学基金;

关键词：

Hierarchical structure; Capillary force lithography; Microscale stamp; EDGE-SPREADING LITHOGRAPHY; SURFACES; NANOSTRUCTURES; WETTABILITY; FILMS; GOLD;

D O I：

10.1016/j.jcis.2011.11.042

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We present a simple sequential imprinting lithography method to fabricate micro/nanoscale hierarchical structures. This method involves hot embossing and capillary force lithography with two stamps of different microscales, which avoids using nanoscale stamps. By varying the experimental conditions in the capillary force lithography process, the morphology of the resulting structures can be controlled. This method may provide a facile and low-cost route for fabricating large area patterns of hierarchical structures. (C) 2011 Elsevier Inc. All rights reserved.

引用

页码：655 / 659

页数：5

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