Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution

被引：13

作者：

Chiou, Chyow-San ^{[1
]}

Chuang, Kai-Jen ^{[2
,3
]}

Lin, Ya-Fen ^{[1
]}

Chen, Hua-Wei ^{[4
]}

Ma, Chih-Ming ^{[4
]}

机构：

[1] Natl Ilan Univ, Dept Environm Engn, Ilan 260, Taiwan

[2] Taipei Med Univ, Sch Med, Dept Publ Hlth, Coll Med, Taipei 110, Taiwan

[3] Taipei Med Univ, Sch Publ Hlth, Coll Publ Hlth & Nutr, Taipei 110, Taiwan

[4] St Marys Jr Coll Med Nursing & Management, Dept Cosmet Applicat & Management, Yilan 266, Taiwan

来源：

INTERNATIONAL JOURNAL OF PHOTOENERGY | 2013年 / 2013卷

关键词：

WASTE-WATER; OZONATION; OXIDATION; PEROXIDE;

D O I：

10.1155/2013/191742

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Tetramethyl ammoniumhydroxide (TMAH) is an anisotropic etchant used in thewet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater. This study evaluated the performance of a system combined with ultraviolet, magnetic catalyst (SiO2/Fe3O4) and O-3, denoted asUV/O-3, to TMAH in an aqueous solution. The mineralization efficiency of TMAH under various conditions follows the sequence: UV/O-3 > UV/H2O2/O-3 > H2O2/SiO2/Fe3O4/O-3 > H2O2/O-3 > SiO2/Fe3O4/O-3 > O-3 > UV/H2O2. The results suggest that UV/O-3 process provides the best condition for the mineralization of TMAH (40mg/L), resulting in 87.6% mineralization, at 60 min reaction time. Furthermore, the mineralization efficiency of SiO2/Fe3O4/H2O2/O-3 was significantly higher than that of O-3, H2O2/O-3, and UV/H2O2. More than 90% of the magnetic catalyst was recovered and easily redispersed in a solution for reuse.

引用

页数：7

共 16 条

[1] Costs of the electrochemical oxidation of wastewaters: A comparison with ozonation and Fenton oxidation processes [J].

Canizares, Pablo ;

Paz, Ruben ;

Saez, Cristina ;

Rodrigo, Manuel A. .

JOURNAL OF ENVIRONMENTAL MANAGEMENT, 2009, 90 (01) :410-420

[2] Photodegradation of o-cresol with ag deposited on TiO2 under visible and UV light irradiation [J].

Chen, Hua Wei ;

Ku, Young ;

Kuo, Yu Lin .

CHEMICAL ENGINEERING & TECHNOLOGY, 2007, 30 (09) :1242-1247

[3] Nitrification-denitrification of opto-electronic industrial wastewater by anoxic/aerobic process [J].

Chen, TK ;

Ni, CH ;

Chen, JN .

JOURNAL OF ENVIRONMENTAL SCIENCE AND HEALTH PART A-TOXIC/HAZARDOUS SUBSTANCES & ENVIRONMENTAL ENGINEERING, 2003, 38 (10) :2157-2167

[4] Effects of chloride ions on the iron(III)-catalyzed decomposition of hydrogen peroxide and on the efficiency of the Fenton-like oxidation process [J].

De Laat, J ;

Le, TG .

APPLIED CATALYSIS B-ENVIRONMENTAL, 2006, 66 (1-2) :137-146

[5] Treatment of organic wastewater discharged from semiconductor manufacturing process by ultraviolet/hydrogen peroxide and biodegradation [J].

Den, W ;

Ko, FH ;

Huang, TY .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2002, 15 (04) :540-551

[6]

Gottschalk C., 2000, Ozonation of water and waste water : a practical guide to understanding ozone and its application

[7] ROLE OF HYDROXYL RADICAL REACTIONS IN OZONATION PROCESSES IN AQUEOUS-SOLUTIONS [J].

HOIGNE, J ;

BADER, H .

WATER RESEARCH, 1976, 10 (05) :377-386

[8] Catalytic ozonation and methods of enhancing molecular ozone reactions in water treatment [J].

Kasprzyk-Hordern, B ;

Ziólek, M ;

Nawrocki, J .

APPLIED CATALYSIS B-ENVIRONMENTAL, 2003, 46 (04) :639-669

[9] Elucidation of the molecular structure of hydrated vanadium oxide species by X-ray absorption spectroscopy:: correlation between the V•••V coordination number and distance and the point of zero charge of the support oxide [J].

Keller, Daphne E. ;

Koningsberger, Diek C. ;

Weckhuysen, Bert M. .

PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2006, 8 (41) :4814-4824

[10] The combination of photocatalysis and ozonolysis as a new approach for cleaning 2,4-dichlorophenoxyaceticacid polluted water [J].

Muller, TS ;

Sun, ZL ;

Kumar, G ;

Itoh, K ;

Murabayashi, M .

CHEMOSPHERE, 1998, 36 (09) :2043-2055

← 1 2 →