Water assisted pulsed laser machining of micro-structured surface on CVD diamond coating tools

被引：40
作者：
Guo, Bing [1 ]
Zhang, Jun [1 ]
Wu, Mingtao [1 ]
Zhao, Qingliang [1 ]
Liu, Han [1 ]
Monier, Amr [1 ]
Wang, Jinhu [2 ]
机构：
[1] Harbin Inst Technol, Sch Mechatron Engn, Ctr Precis Engn, Harbin 150001, Peoples R China
[2] Zhejiang Univ Technol, Ultraprecis Machining Ctr, Hangzhou 310014, Peoples R China
来源：
JOURNAL OF MANUFACTURING PROCESSES | 2020年 / 56卷
基金：
中国国家自然科学基金;
关键词：
Pulsed laser machining; Micro-structured surface; CVD diamond coating; Water assisted; Surface morphology; Parameters optimization; POLYCRYSTALLINE DIAMOND; PRECISION; ABLATION; WHEELS; THIN; OPTIMIZATION; PERFORMANCE; FABRICATION; NITRIDE; GLASS;
D O I：
10.1016/j.jmapro.2020.04.066
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, a water assisted pulsed laser machining with mist spray was investigated for machining the microstructures on chemical vapor deposition (CVD) diamond coating tools. Firstly, the effect of water assisted condition on the machining quality and the transformation of Gauusian laser beam was analyzed. The theoretical calculation method of the shifted value of laser beam spot radius and defocusing quantity in the water assisted laser machining was presented. And then the effects of laser machining parameters included the laser power, the scanning speed, the scanning times and the scanning pitch were discussed in view of the ablation width, ablation depth, material removal rate and machined surface topography. Finally, three kind of micro-structures included micro groove array and cross-scale composite micro-structures were machined successfully on the CVD diamond coating tools by the developed water assisted pulsed laser machining method.
引用
收藏
页码：591 / 601
页数：11
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