Influence of hydrogen on the mechanical properties and microstructure of DLC films synthesized by r.f.-PECVD

被引：22

作者：

Hsu, Jiong-Shiun ^{[1
]}

Tzeng, Shinn-Shyong ^{[2
]}

Wu, Ying-Jie ^{[2
]}

机构：

[1] Ind Technol Res Inst, Ctr Measurement Stand, Hsinchu 300, Taiwan

[2] Tatung Univ, Dept Mat Engn, Taipei 104, Taiwan

来源：

VACUUM | 2008年 / 83卷 / 03期

关键词：

Mechanical properties; Microstructure; Diamond-like carbon films; Radio frequency plasma chemical vapor deposition;

D O I：

10.1016/j.vacuum.2008.04.070

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper aims to investigate the influence of hydrogen on the variation of mechanical properties and microstructure of diamond-like carbon (DLC) films synthesized by radio frequency plasma chemical vapor deposition (r.f.-PECVD). The DLC films were deposited on a silicon substrate (p-type). The reactant gases employed in this paper are a mixture of acetylene and hydrogen. The ratio of hydrogen in the gas mixture was successively varied to clarify its influence on the roughness, thickness, microstructure, hardness, modulus, residual stress and wear depth for the DLC films. The results reveal that increasing the concentration of hydrogen decreases thickness and roughness. Meanwhile, increasing the hydrogen concentration causes the decrease of sp(3) ratio, hardness as well as modulus. Finally, wear behavior is correlated to the surface morphology and hydrogen concentration for deposition with hydrogen-containing reactant gas. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：622 / 624

页数：3

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