Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder - Review

Recently, in accordance with the increasing market demand for ultraprecision technology, a high precision multi-degree-of-freedom displacement measurement technology has become important for industrial applications such as the field of manufacturing and inspection because those physical quantities, linear and angular displacements, are key parameters for keeping and improving quality control of a production system. A number of instruments capable of precise multi-degree-of-freedom measurements have been built and some novel techniques have been introduced. The current state-of-art techniques for multi-degree-of-freedom motion error measurement in a linear stage using laser encoder-implemented system are reviewed. First, we summarize the basic principles behind the measurement technology of the motion error in a stage and simple encoder system. Next, the basic design principles of practical laser encoder system are discussed using the experience of past and existing cases to refer to the important points and the major scientific results. The current trends in the field are significantly discussed, including the novel techniques under construction and advanced technologies. Lastly, the future of multi-functional laser encoder-implemented system, highlighting the kinds of new science upcoming in the next few years, is discussed.