Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy

被引：16

作者：

Mitsuishi, K. ^{[1
]}

lakoubovskii, K. ^{[1
]}

Takeguchi, M. ^{[2
]}

Shimojo, M. ^{[3
]}

Hashimoto, A. ^{[2
]}

Furuya, K. ^{[2
]}

机构：

[1] Natl Inst Mat Sci, Quantum Dto Res Ctr, Tsukuba, Ibaraki 3050005, Japan

[2] Natl Inst Mat Sci, Adv Nano Characterizat Ctr, Tsukuba, Ibaraki 3050005, Japan

[3] Saitama Inst Technol, Adv Sci Res Lab, Saitama 3690293, Japan

来源：

ULTRAMICROSCOPY | 2008年 / 108卷 / 09期

关键词：

confocal electron microscopy; confocal STEM; SCEM; optical sectioning; bloch wave method; image simulation; 3D STEM;

D O I：

10.1016/j.ultramic.2008.04.005

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it Should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix. (c) 2008 Elsevier B.V. All rights reserved.

引用

页码：981 / 988

页数：8

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