MEMS/MOEMS application to optical communication

被引：0
|
作者：
Fujita, M [1 ]
机构：
[1] Univ Tokyo, Ctr Int Res MicroMechatron, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan
来源：
RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS | 2001年 / 4558卷
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The paper describes brief summary of current MEMS(micro electro mechanical systems) technology and its application to optics,The optical application is one of the most important applications of MEMS because of two reasons; one is that the micromachine technology can provide high performances and new functionalities for optical systems and the other is that those optical microsystems can satisfy market demands for optical communication networks, displays, data storage and sensors. Opportunities for MEMS-based devices in optical communication networks are discussed. Some specific examples of MEMS optical switches are described.
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收藏
页码：XXI / XXVII
页数：7
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