Gamma-electron dynamics and radio frequency capacitive sheath diagnostics

被引：4

作者：

Orlov, KE ^{[1
]}

Smirnov, AS ^{[1
]}

机构：

[1] St Petersburg State Tech Univ, Dept Plasma Phys, St Petersburg 195251, Russia

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1999年 / 27卷 / 05期

关键词：

capacitive discharge; plasma sheaths; secondary electron emission; voltage waveforms measurement;

D O I：

10.1109/27.799811

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Time-resolved measurements of gamma-electrons energy spectra in low-pressure capacitively coupled RF discharge are presented. Time dependence of the sheath voltage is calculated from experimental results and compared with theoretical predictions. Good quantitative agreement is observed for collisional sheath. In low pressure discharge sheath voltage time dependence is close to [1 + cos(omega tau )], which qualitatively corresponds to the theoretical results. Asymmetry of electron energy spectra for increasing anti decreasing sheath voltage is observed and explained by divergence and convergence of electron trajectories in plasma (klystron-effect).

引用

页码：1348 / 1352

页数：5

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