Polymer-free, low tension graphene mechanical resonators

被引:7
|
作者
Aleman, Benjamin [1 ,2 ,3 ]
Rousseas, Michael [1 ,3 ]
Yang, Yisheng [1 ]
Regan, Will [1 ,2 ,3 ]
Crommie, Michael [1 ,2 ,3 ]
Wang, Feng [1 ,2 ,3 ]
Zettl, Alex [1 ,2 ,3 ]
机构
[1] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Ctr Integrated Nanomech Syst, Berkeley, CA 94720 USA
[3] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Dept Mat Sci, Berkeley, CA 94720 USA
来源
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS | 2013年 / 7卷 / 12期
基金
美国国家科学基金会;
关键词
graphene; NEMS; resonators; bending rigidity; polymer-free; BENDING RIGIDITY; MEMBRANES; SHEETS; STIFFNESS;
D O I
10.1002/pssr.201300087
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Graphene resonators are fabricated using a polymer-free, direct transfer method onto metal reinforced holey carbon grids. The resonators are distinguished by the absence of organic residues and excellent crystallinity. The normal mode frequencies are measured using a Fabry-Perot technique; resonance curves indicate highly linear behaviour but very little built-in strain, which is consistent with device geometry examined by atomic force microscopy. We conclude that the oscillators' restoring force is due instead to graphene's intrinsic bending rigidity; our measurements indicate a value of approximately 1.0 eV, consistent with previous theoretical and experimental work. ((c) 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
引用
收藏
页码:1064 / 1066
页数:3
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