Single-electron injections in fringing-field-induced charge-trapping memories

被引:4
作者
Chiang, K. H. [1 ]
Chou, S. W. [1 ]
Hsu, H. C. [1 ]
Jeng, E. S. [1 ]
机构
[1] Chung Yuan Christian Univ, Dept Elect Engn, Chungli 32023, Taiwan
关键词
Single-electron; Lucky electron model; NOI and charge-trapping; IMPLANTATION NMOSFETS; NONVOLATILE; CAPACITANCE; SPACERS;
D O I
10.1016/j.mee.2013.06.014
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this study, single-electron and multielectron injections and trapping events on gate-to-drain non-overlapped-implantation (NOI) MOSFETs at room temperature are investigated. The trapped charges cause a reduction in the channel current through the fringing capacitance of the NOI are calculated to verify the charge numbers under various gate voltages (V-g) and drain voltages (V-d). The single-electron injection for different vertical and lateral electric fields and its probability trace are also examined by employing the lucky-electron model. These results show that single-electron injecting events play prominent roles in most of experiments under low bias conditions in the NOI MOSFETs. The significant drain current shift under single-electron injection demonstrates the NOI devices for potential single-electron storage applications. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:66 / 69
页数:4
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