Single-electron;
Lucky electron model;
NOI and charge-trapping;
IMPLANTATION NMOSFETS;
NONVOLATILE;
CAPACITANCE;
SPACERS;
D O I:
10.1016/j.mee.2013.06.014
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
In this study, single-electron and multielectron injections and trapping events on gate-to-drain non-overlapped-implantation (NOI) MOSFETs at room temperature are investigated. The trapped charges cause a reduction in the channel current through the fringing capacitance of the NOI are calculated to verify the charge numbers under various gate voltages (V-g) and drain voltages (V-d). The single-electron injection for different vertical and lateral electric fields and its probability trace are also examined by employing the lucky-electron model. These results show that single-electron injecting events play prominent roles in most of experiments under low bias conditions in the NOI MOSFETs. The significant drain current shift under single-electron injection demonstrates the NOI devices for potential single-electron storage applications. (C) 2013 Elsevier B.V. All rights reserved.