A GaAs/AlGaAs-based refractometer platform for integrated optical sensing applications

被引：14

作者：

Maisenholder, B ^{[1
]}

Zappe, HP ^{[1
]}

Kunz, RE ^{[1
]}

Riel, P ^{[1
]}

Moser, M ^{[1
]}

Edlinger, J ^{[1
]}

机构：

[1] BALZERS AG,FL-9596 BALZERS,LIECHTENSTEIN

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1997年 / 39卷 / 1-3期

关键词：

optical sensors; evanescent-wave interferometers; gallium arsenide; integrated optics; immunosensors;

D O I：

10.1016/S0925-4005(97)80227-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We present a new type of integrated optical refractometer, based on a Mach-Zehnder interferometer using III-V semiconductor and TiO2 on SiO2 waveguides. We report on the design, optimized for high sensitivity in immunoassay sensing applications, and the fabrication of this sensor chip. Using a test liquid system of ethanol in water, we demonstrate a refractive-index resolution of 1 X 10(-5) for this refractometer. This device is a basic building block of a novel, monolithically integrated optical sensing circuit, which can be used for example in chemical or immunological sensing applications.

引用

页码：324 / 329

页数：6

共 14 条

[1] INTEGRATED OPTICAL YOUNG INTERFEROMETER [J].