Heteroepitaxy between wurtzite and corundum materials

被引:17
作者
Hayashi, Yuki [1 ]
Banal, Ryan G. [1 ]
Funato, Mitsuru [1 ]
Kawakami, Yoichi [1 ]
机构
[1] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6158510, Japan
基金
日本学术振兴会;
关键词
VAPOR-PHASE EPITAXY; THIN-FILMS; SAPPHIRE; GROWTH; GAN; AIN; ALN; GAAS;
D O I
10.1063/1.4804328
中图分类号
O59 [应用物理学];
学科分类号
摘要
Heteroepitaxy of wurtzite semiconductors on corundum substrates is widely used in modern optoelectronic devices, because both crystals belong to the same hexagonal close-packed system. However, the constituent atoms in the wurtzite structure align in an ideal hexagon within the (0001) plane, whereas those in the corundum structure are displaced due to empty octahedral sites. Herein, we demonstrate that this atomic arrangement mismatch at the interface generates low-angle grain boundaries in epilayers, and step bunching of corundum substrates with an even number of molecular layers can eliminate the boundaries. Furthermore, we propose that the weakened epitaxial relationship between epilayers and substrates also eliminates low-angle grain boundaries, which may be useful for practical applications. (C) 2013 AIP Publishing LLC.
引用
收藏
页数:8
相关论文
共 35 条
  • [11] Metalorganic chemical vapor phase epitaxy of crack-free GaN on Si (111) exceeding 1 μm in thickness
    Dadgar, A
    Bläsing, J
    Diez, A
    Alam, A
    Heuken, M
    Krost, A
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2000, 39 (11B): : L1183 - L1185
  • [12] GROWTH AND STRUCTURE OF COPPER THIN-FILMS DEPOSITED ON (0001) SAPPHIRE BY MOLECULAR-BEAM EPITAXY
    DEHM, G
    RUHLE, M
    DING, G
    RAJ, R
    [J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1995, 71 (06): : 1111 - 1124
  • [13] Characterization of ultrathin insulating Al2O3 films grown on Nb(110)/sapphire(0001) by tunneling spectroscopy and microscopy
    Dietrich, C
    Boyen, HG
    Koslowski, B
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 94 (03) : 1478 - 1484
  • [14] Epitaxial Interfaces between Crystallographically Mismatched Materials
    Erwin, Steven C.
    Gao, Cunxu
    Roder, Claudia
    Laehnemann, Jonas
    Brandt, Oliver
    [J]. PHYSICAL REVIEW LETTERS, 2011, 107 (02)
  • [15] Characterization of Graphene Films and Transistors Grown on Sapphire by Metal-Free Chemical Vapor Deposition
    Fanton, Mark A.
    Robinson, Joshua A.
    Puls, Conor
    Liu, Ying
    Hollander, Matthew J.
    Weiland, Brian E.
    LaBella, Michael
    Trumbull, Kathleen
    Kasarda, Richard
    Howsare, Casey
    Stitt, Joseph
    Snyder, David W.
    [J]. ACS NANO, 2011, 5 (10) : 8062 - 8069
  • [16] Occurrence of Rotation Domains in Heteroepitaxy
    Grundmann, Marius
    Boentgen, Tammo
    Lorenz, Michael
    [J]. PHYSICAL REVIEW LETTERS, 2010, 105 (14)
  • [17] Haynes WM., 2013, CRC HDB CHEM PHYS, V94th ed., DOI 10.1201/b17118
  • [18] Heying B, 1996, APPL PHYS LETT, V68, P643, DOI 10.1063/1.116495
  • [19] Defect structures of AIN on sapphire(0001) grown by metalorganic vapor-phase epitaxy with different preflow sources
    Kawaguchi, K
    Kuramata, A
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2005, 44 (46-49): : L1400 - L1402
  • [20] EPITAXIAL-GROWTH OF ZINC BLENDE AND WURTZITIC GALLIUM NITRIDE THIN-FILMS ON (001) SILICON
    LEI, T
    FANCIULLI, M
    MOLNAR, RJ
    MOUSTAKAS, TD
    GRAHAM, RJ
    SCANLON, J
    [J]. APPLIED PHYSICS LETTERS, 1991, 59 (08) : 944 - 946