Simulation of Large Scale KDP Crystal Polishing by Computer Controlled Micro-nano Deliquescence

Although Single Point Diamond Turning (SPDT) can do pretty well in optical surfacing of large scale KDP crystal, both the surface accuracy and integrity are considerably high; meanwhile as the defects of micro-waveness and stress are inevitable, the laser-induced damage threshold of KDP optical elements after SPDT still cannot be satisfied. Because of the characters of deliquescent and water-soluble, the process of computer controlled Micro-nano deliquescence is attempted to remove the residual micro-waveness on KDP surface after SPDT. Based on the assumption of Preston and the characters of Micro-nano deliquescence, the model of material removal ratio is suggested, the dwell time for ascertained KDP surface is solved, the processing of computer controlled Micro-nano deliquescence is simulated and the processed surface condition on theory is obtained. Besides, the influences of different parameters on the surfacing efficiency and accuracy are analyzed. Finally, three polishing tracks are comparatively analyzed. The simulation results are quite important in guiding the experimental polishing of large scale KDP by computer controlled Micro-nano deliquescence.