Deposition of highly oriented (K,Na)NbO3 films on flexible metal substrates

被引：13

作者：

Grivel, Jean-Claude ^{[1
]}

Thyden, Karl ^{[1
]}

Bowen, Jacob R. ^{[1
]}

Haugen, Astri Bjornetun ^{[1
]}

机构：

[1] Tech Univ Denmark, Dept Energy Convers & Storage, Frederiksborgvej 399, DK-4000 Roskilde, Denmark

来源：

THIN SOLID FILMS | 2018年 / 650卷

关键词：

Piezoelectric materials; Thin films; Sol-gel preparation; Texture; THIN-FILMS;

D O I：

10.1016/j.tsf.2018.02.008

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In view of developing flexible, highly textured Pb-free piezoelectric thin films, (K,Na)NbO3 was deposited by chemical solution deposition on cube-textured Ni-W alloy substrates. After heat treatment, a strong (001()pc) out-of-plane preferential orientation is created in the (K,Na)NbO3 layer, which also exhibits a sharp in-plane texture with 45 degrees-rotated epitaxial relation to the substrate. The microstructure of the film is strongly dependent on the heat treatment temperature; sub-micrometer grains versus up to 2 mu m long particles forming at 600 degrees C and 900 degrees C respectively. K4Nb6O17 and (K1-xNax)(2)Nb4O11 impurity phases were identified depending on the processing temperature.

引用

收藏

页码：7 / 10

页数：4

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