Carbon nanotube forests growth using catalysts from atomic layer deposition

被引:6
作者
Chen, Bingan [1 ]
Zhang, Can [1 ]
Esconjauregui, Santiago [1 ]
Xie, Rongsi [1 ]
Zhong, Guofang [1 ]
Bhardwaj, Sunil [2 ,3 ]
Cepek, Cinzia [2 ]
Robertson, John [1 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England
[2] CNR Lab TASC, Ist Off Mat, I-34012 Trieste, Italy
[3] Sincrotone Trieste SCpA, I-34149 Trieste, Italy
关键词
CHEMICAL-VAPOR-DEPOSITION; INTERCONNECTS; TRANSITION; ARRAYS; NANOPARTICLES; ARCHITECTURES; MULTILAYERS; FERROCENE; SILICON; BUNDLES;
D O I
10.1063/1.4870951
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have grown carbon nanotubes using Fe and Ni catalyst films deposited by atomic layer deposition. Both metals lead to catalytically active nanoparticles for growing vertically aligned nanotube forests or carbon fibres, depending on the growth conditions and whether the substrate is alumina or silica. The resulting nanotubes have narrow diameter and wall number distributions that are as narrow as those grown from sputtered catalysts. The state of the catalyst is studied by in-situ and ex-situ X-ray photoemission spectroscopy. We demonstrate multi-directional nanotube growth on a porous alumina foam coated with Fe prepared by atomic layer deposition. This deposition technique can be useful for nanotube applications in microelectronics, filter technology, and energy storage. (C) 2014 AIP Publishing LLC.
引用
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页数:7
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