All-fiber differential interferometer for nanometric displacement measurement

被引:10
|
作者
Wang, Xiufang [1 ]
Guo, Xiangyuan [1 ]
Wang, Yuan [2 ]
Jiang, Chunlei [1 ]
Jiang, Jianguo [1 ]
Zhang, Zihua [3 ]
机构
[1] Northeast Petr Univ, Coll Elect & Informat Engn, Daqing 163318, Peoples R China
[2] Jiang Nan Design & Res Inst Machinery & Elect, Wuxi, Jiangsu, Peoples R China
[3] Harbin Inst Technol, Sch Instrumentat Sci & Engn, Harbin 150001, Peoples R China
关键词
Homodyne interferometry; All-fiber differential system; Nanometric displacement; HOMODYNE INTERFEROMETER;
D O I
10.1016/j.optcom.2020.126283
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An all-fiber differential interferometer is proposed to measure nanometric displacements based on the characteristics of unidirectional transmission of light in the circulator. In the new interferometer system, one laser is used as the light source, and two circulators are used as two independent homodyne interferometers to constitute the differential optical-path. Thus, two interference signals are generated without affecting each other. Subsequently, object displacement is reconstructed by comparing the phases of the signals. In this study, the feasibility of the proposed method is demonstrated by experimental measurements, and results show that the standard deviation is in the order of 1 nm.
引用
收藏
页数:5
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